News & Event

  • May 20, 2013
    Technical Update
    Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool Jpn. J. Appl. Phys. 52 (2013) 08JB06
  • Jan. 21, 2013
    Technical Update
    Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate Appl. Phys. Express 6 (2013) 026501
  • Oct. 23, 2012
    Technical Update
    High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system Journal of Crystal Growth
  • Oct. 14, 2012
    Technical Update
    Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
  • Sep. 01, 2012
    Technical Update
    MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies
  • Jun. 01, 2008
    Technical Update
    High growth rate metal organic vapor phase epitaxy GaN "Journal of Crystal Growth 310(2008)3950-3952)"
  • Jan. 01, 2008
    Technical Update
    Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation "Phys.Stat.Sol.(c)5,No.9,3017-3019(2008)"
  • Jan. 01, 2007
    Technical Update
    Multi-wafer Atmospheric Pressure MOVPE Reactor for Nitride Semiconductors and ex-situ Dry Cleaning of Reactor Components by Chlorine Gas for Stable Operation Advance copy for the 34th International Symposium on Compound Semiconductors (ISCS2007)
  • Dec. 01, 2006
    Technical Update
    Ex situ dry cleaning of reactor component of nitride metal organic chemical vapor deposition using chlorinated gases "Journal of Crystal Growth 298 (2007) 433-436"
  • Nov. 01, 2006
    Technical Update
     GaN growth on 150-mm-diameter (111) Si substrates "Journal of Crystal Growth 298 (2007) 198-201"
  • Mar. 01, 2006
    Technical Update
    Growth and electron transport studies of InAlN/GaN two-dimensional electron gas Advance copy for the 53rd Spring Meeting (2006) of the Japan Society of Applied Physics and Related Societies
  • May 01, 2005
    Technical Update
    Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes J. Appl. Phys. 97, 091101 (2005)
  • Jan. 01, 2005
    Technical Update
    Realization of High Internal Quantum Efficiency over 35% in 330 nm-band deep-UV using Quaternary InAlGaN Quantum Well ICNS-6 Late News
  • Sep. 01, 2004
    Technical Update
    Effects of growth pressure on AlGaNand Mg-doped GaN grown using multiwafer metal organic vapor phase epitaxy system
  • Aug. 01, 2004
    Technical Update
    Growth mechanism of atmospheric pressure MOVPE of GaN and its alloys: gas phase chemistry and its impact on reactor design
  • Mar. 25, 2025
    Technical Update
    In Situ Center Wavelength Control of AlInN/GaN Distributed Bragg Reflectors with In Situ Reflectivity Spectra Measurements
  • Mar. 19, 2025
    Technical Update
    Development of RGB monolithic GaInN-based μLED arrays with tunnel junctions
  • Nov. 01, 2024
    Technical Update
    AlN/AlGaN heterojunction field-effect transistors with a high-AlN-mole-fraction Al0.72Ga0.28N channel grown on a single-crystal AlN substrate by metalorganic chemical vapor deposition
  • Apr. 24, 2024
    Technical Update
    Current collapse suppression in AlGaInN/GaN HEMTs with thin unintentionally doped GaN channel and AlN back barrier grown on single-crystal AlN substrate
  • Aug. 17, 2023
    Technical Update
    RGB monolithic GaInN-based μLED arrays connected via tunnel junctions
  • Jan. 13, 2023
    Technical Update
    DC and Pulse I–V Characteristics of Strain-Engineered AlGaInN/GaN HEMTs fabricated on Single-Crystal AlN Substrate
  • Nov. 26, 2020
    Technical Update
    High-quality AlInN/GaN distributed Bragg reflectors grown by metalorganic vapor phase epitaxy
  • Feb. 01, 2017
    Technical Update
    Characteristics of AlN Layer on 4 inch Sapphire Substrate by High Temperature Annealing in Nitrogen Atmosphere
  • Jan. 05, 2017
    Technical Update
    Influence of the Al content of the AlGaN buffer layer in AlGaN/GaN high-electron-mobility transistor structures on a Si substrate
  • Oct. 07, 2016
    Technical Update
    Impact of crystal quality of AlN nucleation layer on the vertical direction breakdown voltage of AlGaN/GaN high-electron-mobility transistor structures on Si
  • Oct. 07, 2016
    Technical Update
    Regrowth of High-Al-content AlGaN and AlN on High-quality AlN Template Fabricated by Annealing at 1700 ℃ under Nitrogen Ambient
  • Aug. 30, 2016
    Technical Update
    Study of carbon concentration in GaN grown by metalorganic chemical vapor deposition
  • Aug. 28, 2016
    Technical Update
    High quality Al0.6Ga0.4N and AlN growth on AlN template with a high temperature annealing in N2 ambience
  • Aug. 28, 2016
    Technical Update
    Challenge and Opportunity of high-flow rate MOCVD tool for UV-LED Application
  • Jul. 10, 2016
    Technical Update
    Characterization of AlN and Mg-doped AlxGa1-xN(x>0.2) Grown by Using Horizontal High-flow-rate MOVPE System 2016 ICMOVPE