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May 20, 2013
Technical Update
Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates
Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool
Jpn. J. Appl. Phys. 52 (2013) 08JB06
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Jan. 21, 2013
Technical Update
Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate
Appl. Phys. Express 6 (2013) 026501
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Oct. 23, 2012
Technical Update
High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system
Journal of Crystal Growth
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Oct. 14, 2012
Technical Update
Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool
Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
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Sep. 01, 2012
Technical Update
MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance
Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies
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Jun. 01, 2008
Technical Update
High growth rate metal organic vapor phase epitaxy GaN
"Journal of Crystal Growth 310(2008)3950-3952)"
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Jan. 01, 2008
Technical Update
Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation
"Phys.Stat.Sol.(c)5,No.9,3017-3019(2008)"
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Jan. 01, 2007
Technical Update
Multi-wafer Atmospheric Pressure MOVPE Reactor for Nitride Semiconductors and ex-situ Dry Cleaning of Reactor Components by Chlorine Gas for Stable Operation
Advance copy for the 34th International Symposium on Compound Semiconductors (ISCS2007)
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Dec. 01, 2006
Technical Update
Ex situ dry cleaning of reactor component of nitride metal organic chemical vapor deposition using chlorinated gases "Journal of Crystal Growth 298 (2007) 433-436"
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Nov. 01, 2006
Technical Update
GaN growth on 150-mm-diameter (111) Si substrates "Journal of Crystal Growth 298 (2007) 198-201"
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Mar. 01, 2006
Technical Update
Growth and electron transport studies of InAlN/GaN two-dimensional electron gas
Advance copy for the 53rd Spring Meeting (2006) of the Japan Society of Applied Physics and Related Societies
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May 01, 2005
Technical Update
Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes
J. Appl. Phys. 97, 091101 (2005)
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Jan. 01, 2005
Technical Update
Realization of High Internal Quantum Efficiency over 35% in 330 nm-band deep-UV using Quaternary InAlGaN Quantum Well
ICNS-6 Late News
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Sep. 01, 2004
Technical Update
Effects of growth pressure on AlGaNand Mg-doped GaN grown using multiwafer metal organic vapor phase epitaxy system
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Aug. 01, 2004
Technical Update
Growth mechanism of atmospheric pressure MOVPE of GaN and its alloys: gas phase chemistry and its impact on reactor design