News

  • Apr. 02, 2014
    Technical Paper
    Normally-OFF Al2O3/AlGaN/GaN MOS-HEMT on 8 in. Si with Low Leakage Current and High Breakdown Voltage (825 V) Appl. Phys. Express 7, 041003 (2014)
  • Mar. 20, 2014
    Technical Paper
    Industry MOCVD: III-N film growth Compound Semiconductor-Volume 20, Number 2-March 20
  • Mar. 18, 2014
    Events
    Taiyo Nippon Sanso will have a booth at "LED Taiwan 2014," to be held at TWTC Nangang Exhibit Hall, Taiwan from March 20 to 23, 2014.
  • Mar. 16, 2014
    News
    Article about TNSC's MOCVD published in Compound Semiconductor magazine
    Faster, better III-N film growth (Page 38) — Compound Semiconductor
  • Oct. 23, 2013
    Technical Paper
    High growth rates of AlN and AlGaN on 8" silicon wafer using metal-organic vapor phase epitaxy reactor
  • Aug. 01, 2013
    Events
    Taiyo Nippon Sanso plans to have a booth at SEMICON Taiwan 2013 from September 4 to 6, 2013 at TWTC Nangang Exhibition Hall, Taiwan.
  • Aug. 01, 2013
    Events
    Taiyo Nippon Sanso is planning both a booth and a presentation on the epi-results of its MOCVD systems during the poster session at ICNS-10 (10th International Conference on Nitride Semiconductors) from August 25 to 30, 2013 at Gaylord National Hotel and Convention Center, Washington.
    TNSC poster session presentation: August 28, 2013 
  • Aug. 01, 2013
    Events
    Taiyo Nippon Sanso plans to have a booth at TWHM 2013 (10th Topical Workshop on Heterostructure Microelectronics) from September 2 to 5, 2013 at Hakodate Kokusai Hotel.
  • May 20, 2013
    Technical Paper
    Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool Jpn. J. Appl. Phys. 52 (2013) 08JB06
  • Jan. 21, 2013
    Technical Paper
    Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate Appl. Phys. Express 6 (2013) 026501
  • Oct. 23, 2012
    Technical Paper
    High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system Journal of Crystal Growth
  • Oct. 14, 2012
    Technical Paper
    Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
  • Sep. 01, 2012
    Technical Paper
    MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies
  • Jun. 01, 2008
    Technical Paper
    High growth rate metal organic vapor phase epitaxy GaN "Journal of Crystal Growth 310(2008)3950-3952)"
  • Jan. 01, 2008
    Technical Paper
    Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation "Phys.Stat.Sol.(c)5,No.9,3017-3019(2008)"
  • Feb. 01, 2017
    Technical Paper
    Characteristics of AlN Layer on 4 inch Sapphire Substrate by High Temperature Annealing in Nitrogen Atmosphere
  • Jan. 05, 2017
    Technical Paper
    Influence of the Al content of the AlGaN buffer layer in AlGaN/GaN high-electron-mobility transistor structures on a Si substrate
  • Oct. 07, 2016
    Technical Paper
    Impact of crystal quality of AlN nucleation layer on the vertical direction breakdown voltage of AlGaN/GaN high-electron-mobility transistor structures on Si
  • Oct. 07, 2016
    Technical Paper
    Regrowth of High-Al-content AlGaN and AlN on High-quality AlN Template Fabricated by Annealing at 1700 ℃ under Nitrogen Ambient
  • Aug. 30, 2016
    Technical Paper
    Study of carbon concentration in GaN grown by metalorganic chemical vapor deposition
  • Aug. 28, 2016
    Technical Paper
    High quality Al0.6Ga0.4N and AlN growth on AlN template with a high temperature annealing in N2 ambience
  • Aug. 28, 2016
    Technical Paper
    Challenge and Opportunity of high-flow rate MOCVD tool for UV-LED Application
  • Jul. 10, 2016
    Technical Paper
    Characterization of AlN and Mg-doped AlxGa1-xN(x>0.2) Grown by Using Horizontal High-flow-rate MOVPE System 2016 ICMOVPE
  • Jun. 26, 2016
    Technical Paper
    Improvement of Crystalline Quality of AlN and High-Al-content AlGaN at High Growth Rate Using Horizontal High-flow-rate MOVPE System CSW 2016
  • Jun. 26, 2016
    Technical Paper
    Relationship between Al content of AlGaN buffer layer on top of initial AlN nucleation layer on Si and vertical leakage current of AlGaN/GaN highelectron-mobility transistor structures CSW 2016
  • Jun. 17, 2016
    Technical Paper
    GROWTH OF N-TYPE AlxGa1-xN (x>0.5) WITH LOW ELECTRIC RESISTIVITY AT HIGH V/III RATIO IWUMD 2016
  • Mar. 19, 2016
    Technical Paper
    Effect of the formation temperature of the AlN/Si interface on the vertical-direction breakdown voltages of AlGaN/GaN HEMTs on Si substrates MRS Advances
  • Mar. 19, 2016
    Technical Paper
    Variation of vertical direction breakdown voltage of the AlGaN/GaN HEMTs on AlN/Si template substrate as a function of growth temperature of initial Al layer MRS2016 spring meeting (Poster Session)
  • Mar. 06, 2016
    Technical Paper
    Breakdown electric field of each layer in AlGaN/GaN high-electron-mobility transistors on Si substrates Isplasma 2016
  • Aug. 23, 2015
    Technical Paper
    Correlation of the initial AlN layer and vertical direction current leakage of AlGaN/GaN high-electron-mobility transistors (HEMTs) on Si substances
    Advance copy for the 11th Topical Workshop on Heterostructure Microelectronics (Poster Session)