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Jun. 26, 2016
Technical Update
Improvement of Crystalline Quality of AlN and High-Al-content AlGaN at High Growth Rate Using Horizontal High-flow-rate MOVPE System
CSW 2016
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Jun. 26, 2016
Technical Update
Relationship between Al content of AlGaN buffer layer on top of initial AlN nucleation layer on Si and vertical leakage current of AlGaN/GaN highelectron-mobility transistor structures
CSW 2016
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Jun. 17, 2016
Technical Update
GROWTH OF N-TYPE AlxGa1-xN (x>0.5) WITH LOW ELECTRIC RESISTIVITY AT HIGH V/III RATIO
IWUMD 2016
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Mar. 19, 2016
Technical Update
Effect of the formation temperature of the AlN/Si interface on the vertical-direction breakdown voltages of AlGaN/GaN HEMTs on Si substrates
MRS Advances
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Mar. 19, 2016
Technical Update
Variation of vertical direction breakdown voltage of the AlGaN/GaN HEMTs on AlN/Si template substrate as a function of growth temperature of initial Al layer
MRS2016 spring meeting (Poster Session)
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Mar. 06, 2016
Technical Update
Breakdown electric field of each layer in AlGaN/GaN high-electron-mobility transistors on Si substrates
Isplasma 2016
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Aug. 23, 2015
Technical Update
Correlation of the initial AlN layer and vertical direction current leakage of AlGaN/GaN high-electron-mobility transistors (HEMTs) on Si substances
Advance copy for the 11th Topical Workshop on Heterostructure Microelectronics (Poster Session)
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Apr. 02, 2014
Technical Update
Normally-OFF Al2O3/AlGaN/GaN MOS-HEMT on 8 in. Si with Low Leakage Current and High Breakdown Voltage (825 V)
Appl. Phys. Express 7, 041003 (2014)
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Mar. 20, 2014
Technical Update
Industry MOCVD: III-N film growth
Compound Semiconductor-Volume 20, Number 2-March 20
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Oct. 23, 2013
Technical Update
High growth rates of AlN and AlGaN on 8" silicon wafer using metal-organic vapor phase epitaxy reactor
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May 20, 2013
Technical Update
Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates
Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool
Jpn. J. Appl. Phys. 52 (2013) 08JB06
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Jan. 21, 2013
Technical Update
Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate
Appl. Phys. Express 6 (2013) 026501
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Oct. 23, 2012
Technical Update
High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system
Journal of Crystal Growth
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Oct. 14, 2012
Technical Update
Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool
Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
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Sep. 01, 2012
Technical Update
MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance
Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies