News & Event

  • Jun. 26, 2016
    Technical Update
    Improvement of Crystalline Quality of AlN and High-Al-content AlGaN at High Growth Rate Using Horizontal High-flow-rate MOVPE System CSW 2016
  • Jun. 26, 2016
    Technical Update
    Relationship between Al content of AlGaN buffer layer on top of initial AlN nucleation layer on Si and vertical leakage current of AlGaN/GaN highelectron-mobility transistor structures CSW 2016
  • Jun. 17, 2016
    Technical Update
    GROWTH OF N-TYPE AlxGa1-xN (x>0.5) WITH LOW ELECTRIC RESISTIVITY AT HIGH V/III RATIO IWUMD 2016
  • Mar. 19, 2016
    Technical Update
    Effect of the formation temperature of the AlN/Si interface on the vertical-direction breakdown voltages of AlGaN/GaN HEMTs on Si substrates MRS Advances
  • Mar. 19, 2016
    Technical Update
    Variation of vertical direction breakdown voltage of the AlGaN/GaN HEMTs on AlN/Si template substrate as a function of growth temperature of initial Al layer MRS2016 spring meeting (Poster Session)
  • Mar. 06, 2016
    Technical Update
    Breakdown electric field of each layer in AlGaN/GaN high-electron-mobility transistors on Si substrates Isplasma 2016
  • Aug. 23, 2015
    Technical Update
    Correlation of the initial AlN layer and vertical direction current leakage of AlGaN/GaN high-electron-mobility transistors (HEMTs) on Si substances
    Advance copy for the 11th Topical Workshop on Heterostructure Microelectronics (Poster Session)
  • Apr. 02, 2014
    Technical Update
    Normally-OFF Al2O3/AlGaN/GaN MOS-HEMT on 8 in. Si with Low Leakage Current and High Breakdown Voltage (825 V) Appl. Phys. Express 7, 041003 (2014)
  • Mar. 20, 2014
    Technical Update
    Industry MOCVD: III-N film growth Compound Semiconductor-Volume 20, Number 2-March 20
  • Oct. 23, 2013
    Technical Update
    High growth rates of AlN and AlGaN on 8" silicon wafer using metal-organic vapor phase epitaxy reactor
  • May 20, 2013
    Technical Update
    Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool Jpn. J. Appl. Phys. 52 (2013) 08JB06
  • Jan. 21, 2013
    Technical Update
    Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate Appl. Phys. Express 6 (2013) 026501
  • Oct. 23, 2012
    Technical Update
    High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system Journal of Crystal Growth
  • Oct. 14, 2012
    Technical Update
    Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
  • Sep. 01, 2012
    Technical Update
    MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies