News & Event

  • Jun. 01, 2008
    Technical Update
    High growth rate metal organic vapor phase epitaxy GaN "Journal of Crystal Growth 310(2008)3950-3952)"
  • Jan. 01, 2008
    Technical Update
    Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation "Phys.Stat.Sol.(c)5,No.9,3017-3019(2008)"
  • Jan. 01, 2007
    Technical Update
    Multi-wafer Atmospheric Pressure MOVPE Reactor for Nitride Semiconductors and ex-situ Dry Cleaning of Reactor Components by Chlorine Gas for Stable Operation Advance copy for the 34th International Symposium on Compound Semiconductors (ISCS2007)
  • Dec. 01, 2006
    Technical Update
    Ex situ dry cleaning of reactor component of nitride metal organic chemical vapor deposition using chlorinated gases "Journal of Crystal Growth 298 (2007) 433-436"
  • Nov. 01, 2006
    Technical Update
     GaN growth on 150-mm-diameter (111) Si substrates "Journal of Crystal Growth 298 (2007) 198-201"
  • Mar. 01, 2006
    Technical Update
    Growth and electron transport studies of InAlN/GaN two-dimensional electron gas Advance copy for the 53rd Spring Meeting (2006) of the Japan Society of Applied Physics and Related Societies
  • May 01, 2005
    Technical Update
    Quaternary InAlGaN-based high-efficiency ultraviolet light-emitting diodes J. Appl. Phys. 97, 091101 (2005)
  • Jan. 01, 2005
    Technical Update
    Realization of High Internal Quantum Efficiency over 35% in 330 nm-band deep-UV using Quaternary InAlGaN Quantum Well ICNS-6 Late News
  • Sep. 01, 2004
    Technical Update
    Effects of growth pressure on AlGaNand Mg-doped GaN grown using multiwafer metal organic vapor phase epitaxy system
  • Aug. 01, 2004
    Technical Update
    Growth mechanism of atmospheric pressure MOVPE of GaN and its alloys: gas phase chemistry and its impact on reactor design
  • Feb. 01, 2002
    Technical Update
    Effect of Growth Parameter on InGaN/GaN MQW Structures Grown with Laminar-Three Flow Multi Wafer AP-MOVPE
  • Jan. 01, 2002
    Technical Update
    Influent of Ambient Hydrogen Gas on Crystalline Quality in GaN