Related Equipment

Electronics Specialty Gases

Providing semiconductor gases depending on customer's various needs with stable quality and safety.

Providing Cylinder Cabinets fully complied to the High Pressure Gas Safety Act (Japan).

Providing various types of purifiers including normal temperature adsorption-type, low temperature adsorption-type, and Getter-type.

Providing gas abatement system (exhaust system) which detoxifies semiconductor material gas with safety and assurance.